Spectroscopic ellipsometry characterization of nano-crystalline diamond films prepared at various substrate temperature and pulsed plasma frequencies using microwave plasma enhanced chemical vapor deposition apparatus with linear antenna deliverydelivery.

Mistrik, J.J.MistrikJanicek, P.P.JanicekTaylor, A.A.TaylorFendrych, F.F.FendrychFekete, L.L.FeketeJager, A.A.JagerNesladek, MilosMilosNesladek2021-10-222021-10-2220140040-6090https://imec-publications.be/handle/20.500.12860/24264Spectroscopic ellipsometry characterization of nano-crystalline diamond films prepared at various substrate temperature and pulsed plasma frequencies using microwave plasma enhanced chemical vapor deposition apparatus with linear antenna deliverydelivery.Journal articlehttp://www.sciencedirect.com/science/article/pii/S0040609014010426