Wafer-scale monolithic integration of AI2O3:Er3+ amplifiers with Si waveguides

Agazzi, L.L.AgazziBradley, J.D.B.J.D.B.BradleyRoelkens, GuntherGuntherRoelkensBaets, RoelRoelBaetsAy, F.F.AyWorhoff, K.K.WorhoffPollnau, M.M.Pollnau2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16634Wafer-scale monolithic integration of AI2O3:Er3+ amplifiers with Si waveguidesProceedings paper