Soethoudt, JobJobSoethoudtTomczak, YoannYoannTomczakMeynaerts, BenBenMeynaertsChan, BTBTChanDelabie, AnneliesAnneliesDelabie2021-10-292021-10-2920201932-7447https://imec-publications.be/handle/20.500.12860/35986Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxideJournal articlehttps://doi.org/10.1021/acs.jpcc.9b11270