Van Elshocht, SvenSvenVan ElshochtCarter, RichardRichardCarterCaymax, MattyMattyCaymaxClaes, MartineMartineClaesConard, ThierryThierryConardDate, LucienLucienDateDe Gendt, StefanStefanDe GendtKaushik, VidyaVidyaKaushikKerber, AndreasAndreasKerberKluth, J.J.KluthLujan, GuilhermeGuilhermeLujanPetry, JasmineJasminePetryPique, DidierDidierPiqueRichard, OlivierOlivierRichardRohr, ErikaErikaRohrShimamoto, YasuhiroYasuhiroShimamotoTsai, WilmanWilmanTsaiHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8271Scalability of MOCVD-deposited Hafnium oxideProceedings paper