Mechanical behavior of porous thin low-k films during nanoindentation

Okudur, Oguzhan OrkutOguzhan OrkutOkudurVanstreels, KrisKrisVanstreelsSaleh, Ahmed SobhiAhmed SobhiSalehHangen, UdeUdeHangenDe Wolf, IngridIngridDe Wolf2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33692Mechanical behavior of porous thin low-k films during nanoindentationMeeting abstract