Defect-induced bandgap narrowing in low-k dielectrics

Guo, XXGuoZheng, HHZhengKing, SSKingAfanasiev, ValeriValeriAfanasievBaklanov, MikhaïlMikhaïlBaklanovde Marneffe, Jean-FrancoisJean-Francoisde MarneffeNishi, Y.Y.NishiShohet, J.J.Shohet2021-10-222021-10-2220150003-6951https://imec-publications.be/handle/20.500.12860/25349Defect-induced bandgap narrowing in low-k dielectricsJournal articlehttp://scitation.aip.org/content/aip/journal/apl/107/8/10.1063/1.4929702