A manufacturable process to improve thermal stability of 0.25-µm cobalt silicided poly gate

Wang, QingfengQingfengWangLauwers, A.A.LauwersDeweerdt, BrunoBrunoDeweerdtVerbeeck, RitaRitaVerbeeckLoosen, FredFredLoosenMaex, KarenKarenMaex2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/1005A manufacturable process to improve thermal stability of 0.25-µm cobalt silicided poly gateJournal article