Opto controlled RF attenuator on high resistivity silicon

Poesen, GertGertPoesenKoers, G.G.KoersStiens, JohanJohanStiensCarchon, GeertGeertCarchonDe Raedt, WalterWalterDe RaedtVounckx, RogerRogerVounckx2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11029Opto controlled RF attenuator on high resistivity siliconProceedings paper