Electrical activity of dislocations and defects in strained Si and Ge based devices

Simoen, EddyEddySimoenEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyenLoo, RogerRogerLooBargallo Gonzalez, MireiaMireiaBargallo GonzalezClaeys, CorCorClaeys2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14473Electrical activity of dislocations and defects in strained Si and Ge based devicesMeeting abstract