C-AFM Characterization of the dependance of AlHfOx electrical behaviour on post deposition annealing temperature

Blasco, X.X.BlascoPetry, JasmineJasminePetryNafria, M.M.NafriaAymerich, X.X.AymerichVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7222C-AFM Characterization of the dependance of AlHfOx electrical behaviour on post deposition annealing temperatureOral presentation