Decoster, StefanStefanDecosterLazzarino, FredericFredericLazzarinoPiao, XiaoyuXiaoyuPiaoFeurprier, YannickYannickFeurprierRassoul, NouredineNouredineRassoulPiumi, DanieleDanielePiumi2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28195Tone reversal technology development targeting below 5nm technology node applicationsMeeting abstracthttp://www2.avs.org/symposium2017/Papers/Paper_PS-WeM11.html