Topside release of atomic force microscopy probes with molded diamond tips

Fouchier, MarcMarcFouchierEyben, PierrePierreEybenJamieson, GeraldineGeraldineJamiesonVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8910Topside release of atomic force microscopy probes with molded diamond tipsOral presentation