Mathew, BobinBobinMathewArad, ShaharShaharAradBrand, OmriOmriBrandFrank, TalTalFrankAlkoken, RanRanAlkokenShilo, YaelYaelShiloMelamed, YardenYardenMelamedYosef, Rotem MorRotem MorYosefSuh, Hyo SeonHyo SeonSuhHeo, SeonggilSeonggilHeoHalder, SandipSandipHalder2023-10-132023-07-282023-10-132023978-1-5106-6099-10277-786XWOS:001022962000003https://imec-publications.be/handle/20.500.12860/42234Unbiased roughness measurements for 0.55NA EUV material setupProceedings paper10.1117/12.2658505978-1-5106-6100-4WOS:001022962000003