Erdmann, AndreasAndreasErdmannEvanschitzky, PeterPeterEvanschitzkyMesilhy, HazemHazemMesilhyPhilipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxBauer, MarkusMarkusBauer2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30682Attenuated PSM for EUV: Can they mitigate 3D mask effects?Proceedings paperhttps://doi.org/10.1117/12.2299648