Chan, BTBTChanKunnen, EddyUhlig, Matthiasde Marneffe, Jean-FrancoisXu, KaidongBoullart, WernerRau, BerndPoortmans, Jef2021-10-202021-10-2020120021-4922https://imec-publications.be/handle/20.500.12860/20433Study of SF6/N2O microwave plasma for surface texturing of multi-crystalline (< 150 μm) solar substratesJournal article