Breuil, LaurentLaurentBreuilNyns, LauraLauraNynsBanerjee, KaustuvKaustuvBanerjeeVadakupudhu Palayam, SenthilSenthilVadakupudhu PalayamSubirats, AlexandreAlexandreSubiratsRichard, OlivierOlivierRichardConard, ThierryThierryConardVan den Bosch, GeertGeertVan den BoschFurnemont, ArnaudArnaudFurnemont2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32616Impact of SiON tunnel layer composition on 3D NAND cell performanceProceedings paperhttps://ieeexplore.ieee.org/document/8739714