Shamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivDictus, DriesDriesDictusBaklanov, MikhaïlMikhaïlBaklanovBeckx, StephanStephanBeckxBoullart, WernerWernerBoullart2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14460Using ellipsometry for assessment of TiN surface roughness after plasma etchJournal article