Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance

Everaert, Jean-LucJean-LucEveraertRosseel, ErikErikRosseelMeszaros, A.A.MeszarosKis-Szabo, K.K.Kis-SzaboTutto, P.P.TuttoPap, A.A.PapPavelka, T.T.PavelkaWilson, M.M.WilsonFindlay, A.A.FindlayJastrzebski, L.L.JastrzebskiLagowski, J.J.Lagowski2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17086Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistanceMeeting abstract