Van den hove, LucLucVan den hoveGoethals, MiekeMiekeGoethalsRonse, KurtKurtRonseVan Bavel, MiekeMiekeVan BavelVandenberghe, GeertGeertVandenberghe2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6924Lithography for sub-90nm applicationsProceedings paper