Xu, XiuMeiXiuMeiXuVereecke, GuyGuyVereeckevan den Hoogen, ErikErikvan den HoogenSmeers, JensJensSmeersArmini, SilviaSilviaArminiDelande, TinneTinneDelandeStruyf, HerbertHerbertStruyf2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23415Wetting challenges in cleaning of high aspect ratio nano-structuresProceedings paper