Sims depth profiling with sub-nm resolution (?)

Vandervorst, WilfriedWilfriedVandervorstDouhard, BastienBastienDouhardDelmotte, JorisJorisDelmotteVincent, BenjaminBenjaminVincent2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20014Sims depth profiling with sub-nm resolution (?)Meeting abstract