Finders, JoJoFindersDusa, MirceaMirceaDusaNikolsky, PeterPeterNikolskyVan Dommelen, YouriYouriVan DommelenWatso, RobertRobertWatsoVandeweyer, TomTomVandeweyerBekaert, JoostJoostBekaertLaenens, BartBartLaenensVan Look, LieveLieveVan Look2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17104Litho and patterning challenges for memory and logic applications at the 22nm nodeProceedings paper