Material parameters for analytical and numerical modelling of Si and strained SiGe heterostructure devices

Jain, SureshSureshJainMehra, AnupamaAnupamaMehraDecoutere, StefaanStefaanDecoutereMaes, HermanHermanMaesWillander, M.M.Willander2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5365Material parameters for analytical and numerical modelling of Si and strained SiGe heterostructure devicesProceedings paper