Perpendicular magnetic anisotropy of CoFeB\Ta bilayers on ALD HfO2

Vermeulen, BartBartVermeulenSwerts, JohanJohanSwertsCouet, SebastienSebastienCouetRadu, IulianaIulianaRaduDetavernier, ChristopheChristopheDetavernierJochum, JohannaJohannaJochumVan Bael, MargrietMargrietVan BaelTemst, KristiaanKristiaanTemstGroeseneken, GuidoGuidoGroesenekenMartens, KoenKoenMartensShukla, NNShuklaMiwa, SSMiwaSuzuki, YYSuzuki2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27534Perpendicular magnetic anisotropy of CoFeB\Ta bilayers on ALD HfO2Meeting abstract