Evidence and characterization of crystallographic defect and material quality after SLIM-cut process

Masolin, AlexAlexMasolinVaes, JanJanVaesDross, FredericFredericDrossPesquera, AmaiaAmaiaPesqueraPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19400Evidence and characterization of crystallographic defect and material quality after SLIM-cut processProceedings paper