MOVPE based Zn diffusion into InP and InAsp/InP hetero structures

Vanhollebeke, KoenKoenVanhollebekeD'Hondt, MarkMarkD'HondtMoerman, IngridIngridMoermanVan Daele, PeterPeterVan DaeleDemeester, PietPietDemeester2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5793MOVPE based Zn diffusion into InP and InAsp/InP hetero structuresJournal article