Norga, GerdGerdNorgaFè, LauraLauraFèWouters, DirkDirkWoutersMaes, HermanHermanMaes2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4628Effect of RuO2 growth temperature on ferroelectric properties of RuO2/Pb(Zr,Ti)O3/RuO2/Pt capacitorsJournal article