El Rifai, JoumanaJoumanaEl RifaiWitvrouw, AnnAnnWitvrouwAbdel Aziz, AhmedAhmedAbdel AzizPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofSedky, SherifSherifSedky2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17062Selective laser annealing for improved SiGe MEMS structural layers at 210°CProceedings paper