Clarysse, TrudoTrudoClarysseEyben, PierrePierreEybenJanssens, TomTomJanssensHoflijk, IlseIlseHoflijkVanhaeren, DanielleDanielleVanhaerenSatta, AlessandraAlessandraSattaMeuris, MarcMarcMeurisVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10239Active dopant characterization methodology for GermaniumProceedings paper