The impact of processing-induced defects on the electrical characteristics and the degradation of Si n+p junctions

Simoen, EddyEddySimoenVanhellemont, JanJanVanhellemontKaniava, A.A.KaniavaClaeys, CorCorClaeys2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/500The impact of processing-induced defects on the electrical characteristics and the degradation of Si n+p junctionsProceedings paper