Area selective grafting of siloxane molecules on low-k dielectric with resepct to copper surface

Rezvanov, AskarAskarRezvanovGornev, E.S.E.S.Gornevde Marneffe, Jean-FrancoisJean-Francoisde MarneffeArmini, SilviaSilviaArmini2021-10-272021-10-2720190169-4332https://imec-publications.be/handle/20.500.12860/33889Area selective grafting of siloxane molecules on low-k dielectric with resepct to copper surfaceJournal articlehttps://www.sciencedirect.com/science/article/pii/S0169433219300972