Determination of energy and spatial distribution of oxide border traps in In0.53Ga0.47As MOS capacitors fron capacitance-voltage characteristics measured at various temperatures

Dou, ChunmengChunmengDouLin, DennisDennisLinVais, AbhitoshAbhitoshVaisIvanov, TsvetanTsvetanIvanovChen, Han-PingHan-PingChenMartens, KoenKoenMartensKakushima, KuniyukiKuniyukiKakushimaIwai, HiroshiHiroshiIwaiTaur, YuanYuanTaurThean, AaronAaronTheanGroeseneken, GuidoGuidoGroeseneken2021-10-222021-10-2220140026-2714https://imec-publications.be/handle/20.500.12860/23771Determination of energy and spatial distribution of oxide border traps in In0.53Ga0.47As MOS capacitors fron capacitance-voltage characteristics measured at various temperaturesJournal articlehttp://www.sciencedirect.com/science/article/pii/S0026271413004757