Hybrid material integration in silicon photonic integrated circuits

Chakravarty, SwapnajitSwapnajitChakravartyTeng, MinMinTengSafian, RezaRezaSafianZhuang, LeimengLeimengZhuang2022-01-132022-01-112022-01-1320211674-4926WOS:000739509600001https://imec-publications.be/handle/20.500.12860/38732Hybrid material integration in silicon photonic integrated circuitsJournal article review10.1088/1674-4926/42/4/041303WOS:000739509600001ON-INSULATORWAVE-GUIDEMODULATORLAYER