PZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuits

Ansari, IrfanIrfanAnsariFeutmba, Gilles F.Gilles F.FeutmbaDieussaert, EmielEmielDieussaertGeorge, John P.John P.GeorgeBeeckman, JeroenJeroenBeeckmanVan Thourhout, DriesDriesVan Thourhout2023-08-242023-06-202023-08-242022978-1-5106-4879-10277-786XWOS:000836324200036https://imec-publications.be/handle/20.500.12860/41806PZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuitsProceedings paper10.1117/12.2610629978-1-5106-4880-7WOS:000836324200036SILICON