A DLTS study of SiO2 and SiO2/SiNx surface passivation of silicon

Simoen, EddyEddySimoenGong, ChunChunGongPosthuma, NielsNielsPosthumaVan Kerschaver, EmmanuelEmmanuelVan KerschaverPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-192021-10-1920110013-4651https://imec-publications.be/handle/20.500.12860/19787A DLTS study of SiO2 and SiO2/SiNx surface passivation of siliconJournal article