Orientation dependence of Si1-xCx:P growth and the impact on FinFET structues

Tolle, JohnJohnTolleWeeks, DoranDoranWeeksBauer, MatthiasMatthiasBauerMachkaoutsan, VladimirVladimirMachkaoutsanMaes, JanJanMaesTogo, MitsuhiroMitsuhiroTogoBrus, StephanStephanBrusHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLoo2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21623Orientation dependence of Si1-xCx:P growth and the impact on FinFET structuesMeeting abstract