Cu deposition on Si surfaces from HF solutions in VLSI microfabrication

Teerlinck, IvoIvoTeerlinckMertens, PaulPaulMertensVos, RitaRitaVosMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1526Cu deposition on Si surfaces from HF solutions in VLSI microfabricationOral presentation