Ultra-low copper baths for sub-35 nm copper interconnects

Atanasova, TanyaTanyaAtanasovaCarbonell, LaureLaureCarbonellCaluwaerts, RudyRudyCaluwaertsTokei, ZsoltZsoltTokeiStrubbe, KatrienKatrienStrubbeVereecken, PhilippePhilippeVereecken2021-10-212021-10-2120130013-4651https://imec-publications.be/handle/20.500.12860/21996Ultra-low copper baths for sub-35 nm copper interconnectsJournal articlehttp://jes.ecsdl.org/content/160/12/D3255.abstract?etoc