State-of-the-art of EUV materials for N5 logic and DRAM applications

De Simone, DaniloDaniloDe SimoneVesters, YannickYannickVestersVanelderen, PieterPieterVanelderenXue, RanRanXuePollentier, IvanIvanPollentierVandenberghe, GeertGeertVandenberghe2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30555State-of-the-art of EUV materials for N5 logic and DRAM applicationsProceedings paperhttps://doi.org/10.1117/12.2502915