Ultra-miniaturized integrated cavities on high-resistivity silicon thin-film MCM-D technology

Posada Quijano, GuillermoGuillermoPosada QuijanoCarchon, GeertGeertCarchonNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe Raedt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14336Ultra-miniaturized integrated cavities on high-resistivity silicon thin-film MCM-D technologyProceedings paper