"Self-Focusing – SIMS" : composition analysis of thin films beyond the lateral resolution

Franquet, AlexisAlexisFranquetDouhard, BastienBastienDouhardConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26635"Self-Focusing – SIMS" : composition analysis of thin films beyond the lateral resolutionOral presentation