Leakage and TDDB Mechanisms in 18 nm Pitch Direct Metal Etch Ru Interconnects with Airgaps

Lesniewska, AlicjaAlicjaLesniewskaFang, YuYuFangDelie, GillesGillesDelieRoussel, PhilippePhilippeRousselVan Sever, KoenKoenVan SeverChery, EmmanuelEmmanuelCheryVarela Pedreira, OlallaOlallaVarela PedreiraCiofi, IvanIvanCiofiPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokeiCroes, KristofKristofCroes2025-12-102025-12-102025-01-01979-8-3315-0478-61541-7026https://imec-publications.be/handle/20.500.12860/58534engLeakage and TDDB Mechanisms in 18 nm Pitch Direct Metal Etch Ru Interconnects with AirgapsProceedings paper10.1109/IRPS48204.2025.10982715WOS:001546466200003