Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy

Eyben, PierrePierreEybenDuhayon, NatasjaNatasjaDuhayonAlvarez, DavidDavidAlvarezVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7562Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopyProceedings paper