Analyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical model

Wostyn, KurtKurtWostynKim, Tae-GonTae-GonKimMertens, PaulPaulMertensPark, Jin-GooJin-GooPark2021-10-182021-10-1820091662-9779https://imec-publications.be/handle/20.500.12860/16560Analyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical modelJournal articlewww.scientific.net