Study of the early stage kinetics of SOI formation in stimulated regimes

Litovchenko, V.V.LitovchenkoRomanyuk, B.B.RomanyukEfremov, A.A.EfremovMelnik, V.V.MelnikClaeys, C.C.ClaeysVanhellemont, JanJanVanhellemont2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3628Study of the early stage kinetics of SOI formation in stimulated regimesOral presentation