Towards a physical understanding of spreading resistance probe profiling

Snauwaert, J.J.SnauwaertHellemans, L.L.HellemansCzech, IngridIngridCzechClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstPawlik, M.M.Pawlik2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/363Towards a physical understanding of spreading resistance probe profilingJournal article