Advanced surface preparation leading into the nano-era

Onsia, BartBartOnsiaDe Gendt, StefanStefanDe GendtDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan ElshochtCaymax, MattyMattyCaymaxConard, ThierryThierryConardHeyns, MarcMarcHeynsLin, S.S.LinGreen, MartinMartinGreenTsai, WilmanWilmanTsai2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7956Advanced surface preparation leading into the nano-eraOral presentation