Ong, PatrickPatrickOngPeddeti, ShivajiShivajiPeddetiLeunissen, PeterPeterLeunissenBabu, S.V.S.V.Babu2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19512CMP of Ge and InP for microelectronic applicationsOral presentation