Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

Timmermans, MarinaMarinaTimmermansPollentier, IvanIvanPollentierKorytov, MaximMaximKorytovNuytten, ThomasThomasNuyttenSergeant, StefanieStefanieSergeantConard, ThierryThierryConardMeersschaut, JohanJohanMeersschautZhang, YideYideZhangDialameh, MasoudMasoudDialamehAlaerts, WilfriedWilfriedAlaertsJazaeri, EhsanEhsanJazaeriSpampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetBrems, StevenStevenBremsHuyghebaert, CedricCedricHuyghebaertGallagher, EmilyEmilyGallagher2023-01-192021-11-022023-01-1920211932-5150WOS:000703599200005https://imec-publications.be/handle/20.500.12860/37466Carbon nanotube EUV pellicle tunability and performance in a scanner-like environmentJournal article10.1117/1.JMM.20.3.031010WOS:000703599200005ELECTRON-BEAMRAMAN-SPECTROSCOPYPURIFICATIONHYDROGENATION