La Doped HZO-Based 3D-Trench Metal-Ferroelectric-Metal Capacitors With High-Endurance (>10¹²) for FeRAM Applications

Walke, AmeyAmeyWalkePopovici, Mihaela IoanaMihaela IoanaPopoviciHoushmand Sharifi, ShaminShaminHoushmand SharifiDemir, Eyup CanEyup CanDemirPuliyalil, HarinarayananHarinarayananPuliyalilBizindavyi, JasperJasperBizindavyiYasin, FarrukhFarrukhYasinClima, SergiuSergiuClimaFantini, AndreaAndreaFantiniBelmonte, AttilioAttilioBelmonteKar, Gouri SankarGouri SankarKarVan Houdt, JanJanVan Houdt2025-04-102024-07-102025-04-1020240741-3106WOS:001194155100019https://imec-publications.be/handle/20.500.12860/44138La Doped HZO-Based 3D-Trench Metal-Ferroelectric-Metal Capacitors With High-Endurance (>10¹²) for FeRAM ApplicationsJournal article10.1109/LED.2024.3368225WOS:001194155100019